Specific Process Knowledge/Etch/Etching of Polymer: Difference between revisions
| Line 74: | Line 74: | ||
*Oxygen plasma | *Oxygen plasma | ||
*Oxygen plasma mixed with | *Oxygen plasma mixed with | ||
** | **CO2 | ||
**SF6 | **SF6 | ||
**Ar | |||
| | | | ||
*Oxygen plasma | *Oxygen plasma | ||
| Line 74: | Line 74: | ||
*Oxygen plasma | *Oxygen plasma | ||
*Oxygen plasma mixed with | *Oxygen plasma mixed with | ||
** | **CO2 | ||
**SF6 | **SF6 | ||
**Ar | |||
| | | | ||
*Oxygen plasma | *Oxygen plasma | ||