Specific Process Knowledge/Etch/Etching of Polymer: Difference between revisions

@@ Line 100: / Line 100: @@
 !Substrate size
 |
-*<nowiki>#</nowiki> small samples
+*samples smaller than 100 mm wafers must be glued to a 100 mm wafer or placed in a reces on a 100mm wafer.
-*<nowiki>#</nowiki> 50 mm wafers
+*<nowiki>#</nowiki>1 100 mm wafer
-*<nowiki>#</nowiki> 100 mm wafers
+*<nowiki>#</nowiki>1 150 mm wafer (only when system is set up to 150mm wafers)
-*<nowiki>#</nowiki> 150 mm wafers
 |
 *<nowiki>#</nowiki> small samples
-*<nowiki>#</nowiki> 50 mm wafers
+*<nowiki>#</nowiki>25 50 mm wafers
-*<nowiki>#</nowiki> 100 mm wafers
+*<nowiki>#</nowiki>25 100 mm wafers
-*<nowiki>#</nowiki> 150 mm wafers
+*<nowiki>#</nowiki>1 150 mm wafer
 |
 *<nowiki>#</nowiki> small samples
-*<nowiki>#</nowiki> 50 mm wafers
+*<nowiki>#</nowiki>25 50 mm wafers
-*<nowiki>#</nowiki> 100 mm wafers
+*<nowiki>#</nowiki>25 100 mm wafers
-*<nowiki>#</nowiki> 150 mm wafers
+*<nowiki>#</nowiki>25 150 mm wafers
 |
-*<nowiki>#</nowiki> small samples
+*samples smaller that can fit on a 100mm wafer.
-*<nowiki>#</nowiki> 50 mm wafers
+*<nowiki>#</nowiki>1 50 mm wafer
-*<nowiki>#</nowiki> 100 mm wafers
+*<nowiki>#</nowiki>1 100 mm wafer
-*<nowiki>#</nowiki> 150 mm wafers
+*<nowiki>#</nowiki>1 150 mm wafer (only when the system is set up for 150mm wafers).
 |
 *<nowiki>#</nowiki> small samples