Specific Process Knowledge/Etch/Etching of Polymer: Difference between revisions

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 |-
 |-style="background:LightGrey; color:black"
-!Parameter 1
+!Etch direction
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-*A
+Process dependant: <br>
-*B
+Isotropic to anisotropic (vertical to sample surface)
 |
-*A
+Isotropic
-*B
 |
-*A
+Isotropic
-*B
 |
-*A
+Process dependant: <br>
-*B
+Almost isotropic to anisotropic (vertical to sample surface)
 |
-*A
+Isotropic
-*B
 |-