Specific Process Knowledge/Etch/Etching of Polymer: Difference between revisions
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*[[/Deposition of silicon nitride using LPCVD|Process description using method 1]] | *[[/Deposition of silicon nitride using LPCVD|Process description using method 1]] | ||
*[[/ | *[[/Etch of Photo Resist using RIE|Etch of Photo Resist using RIE]] | ||
*[[/Deposition of silicon nitride using LPCVD|Process description using method 1]] | *[[/Deposition of silicon nitride using LPCVD|Process description using method 1]] | ||