Specific Process Knowledge/Etch/Etching of Platinum: Difference between revisions
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*~?nm/min | *~?nm/min | ||
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*~ | *~30nm/min (not tested yet) | ||
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| Line 39: | Line 39: | ||
*~?nm/min | *~?nm/min | ||
| | | | ||
*~ | *~30nm/min (not tested yet) | ||
|- | |- | ||