Specific Process Knowledge/Etch/Etching of Platinum: Difference between revisions
| Line 37: | Line 37: | ||
!Etch rate range | !Etch rate range | ||
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*~ | *~?nm/min | ||
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*~55nm/min (not tested yet) | *~55nm/min (not tested yet) | ||
| Line 37: | Line 37: | ||
!Etch rate range | !Etch rate range | ||
| | | | ||
*~ | *~?nm/min | ||
| | | | ||
*~55nm/min (not tested yet) | *~55nm/min (not tested yet) | ||