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Specific Process Knowledge/Etch/Etching of Gold: Difference between revisions

BGE (talk | contribs)
BGE (talk | contribs)
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!'''Allowed materials'''
!'''Allowed materials'''
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*Aluminium
No restrictions cross contamination wise as long as you use the right beaker and make sure that they are safe to enter in the chemicals
*Silicon
*Silicon Oxide
*Silicon Nitride
*Silicon Oxynitride
*Photoresist
*E-beam resist
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|
*Aluminium
No restrictions cross contamination wise as long as you use the right beaker and make sure that they are safe to enter in the chemicals
*Silicon
*Silicon Oxide
*Silicon Nitride
*Silicon Oxynitride
*Photoresist
*E-beam resist
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|
*Silicon  
*Silicon