Specific Process Knowledge/Etch/Etching of Gold: Difference between revisions
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*~?nm/min - fast etch | *~?nm/min - fast etch | ||
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*~ | *~55nm/min (acceptance test) | ||
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| Line 102: | Line 102: | ||
*~?nm/min - fast etch | *~?nm/min - fast etch | ||
| | | | ||
*~ | *~55nm/min (acceptance test) | ||
|- | |- | ||