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Specific Process Knowledge/Thin film deposition/Furnace LPCVD Nitride: Difference between revisions

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At the moment we have one LPCVD furnace for nitride depositions.
==A few words about the furnace==
==A few words about the furnace==
[[image:Furnace_nitride1.jpg|300x300px|right|thumb|B2 Furnace LPCVD Nitride: positioned in cleanroom 2]]
[[image:Furnace_nitride1.jpg|300x300px|right|thumb|B2 Furnace LPCVD Nitride: positioned in cleanroom 2]]
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