Specific Process Knowledge/Etch/Etching of Gold: Difference between revisions
| Line 69: | Line 69: | ||
Etching of Gold can be done either by wet etch, dry etch or by sputtering with ions. | Etching of Gold can be done either by wet etch, dry etch or by sputtering with ions. | ||
*[[Specific Process Knowledge/Etch/Wet | *[[Specific Process Knowledge/Etch/Wet Gold Etch|Etching of Gold by wet etch]] | ||
*[[Specific_Process_Knowledge/Etch/IBE⁄IBSD Ionfab 300|Sputtering of Al]] | *[[Specific_Process_Knowledge/Etch/IBE⁄IBSD Ionfab 300|Sputtering of Al]] | ||
<br clear="all" /> | <br clear="all" /> | ||