Specific Process Knowledge/Thin film deposition/Furnace LPCVD Nitride: Difference between revisions
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==Process Knowledge== | |||
Please take a look at the process side for deposition of Silicon Nitride using LPCVD: | Please take a look at the process side for deposition of Silicon Nitride using LPCVD: | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using LPCVD|Deposition of Silicon Nitride using LPCVD]] | [[Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using LPCVD|Deposition of Silicon Nitride using LPCVD]] | ||
To the right you see a rough overview of the performance of LPCVD Silicon Nitride and some process related parameters. | To the right you see a rough overview of the performance of LPCVD Silicon Nitride and some process related parameters. | ||