Specific Process Knowledge/Etch/Wet Chromium Etch: Difference between revisions
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|~40-100 nm/min | |~40-100 nm/min | ||
|~? nm/min | |||
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|'''Batch size''' | |'''Batch size''' | ||
| Line 55: | Line 55: | ||
|. | |. | ||
|~40-100 nm/min | |~40-100 nm/min | ||
|~? nm/min | |||
|- | |- | ||
|'''Batch size''' | |'''Batch size''' | ||