Specific Process Knowledge/Etch/Wet Silicon Nitride Etch: Difference between revisions
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Etch/strip of silicon nitride | Etch/strip of silicon nitride | ||
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|'''Link to safety APV and KBA''' | |||
|[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1892&mach=130 see APV here] | |||
[http://kemibrug.dk/KBA/CAS/108568/?show_KBA=1&portaldesign=1 see KBA here] | |||
|[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1892&mach=130 see APV here] | |||
[http://kemibrug.dk/KBA/CAS/108568/?show_KBA=1&portaldesign=1 see KBA here] | |||
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|'''Chemical solution''' | |'''Chemical solution''' | ||