Specific Process Knowledge/Etch/Wet Chromium Etch: Difference between revisions
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|'''Etch rate''' | |'''Etch rate''' | ||
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|~40-100 nm/min | |~40-100 nm/min | ||
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|'''Batch size''' | |'''Batch size''' | ||
No edit summary |
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| Line 53: | Line 53: | ||
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|'''Etch rate''' | |'''Etch rate''' | ||
|. | |||
|~40-100 nm/min | |~40-100 nm/min | ||
|- | |- | ||
|'''Batch size''' | |'''Batch size''' | ||