Specific Process Knowledge/Etch/Wet Titanium Etch: Difference between revisions
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| Etch of titanium with or without photoresist mask. | | Etch of titanium with or without photoresist mask. | ||
| Etch of titanium (as stripper or with eagle resist). | | Etch of titanium (as stripper or with eagle resist). | ||
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|'''Link to APV''' | |||
|[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 see APV here] | |||
|[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 see APV here] | |||
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|'''Chemical solution''' | |'''Chemical solution''' | ||