Specific Process Knowledge/Etch/KOH Etch: Difference between revisions
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'''Feedback to this page''': '''[mailto:wetchemistry@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/KOH_Etch click here]''' | |||
==KOH etch - ''Anisotropic silicon etch''== | ==KOH etch - ''Anisotropic silicon etch''== | ||
[[Image:KOH_4tommer.jpg|300x399px|thumb|KOH etch for 4" wafers: positioned in cleanroom 3]] | [[Image:KOH_4tommer.jpg|300x399px|thumb|KOH etch for 4" wafers: positioned in cleanroom 3]] | ||