Specific Process Knowledge/Etch/Etching of Titanium: Difference between revisions
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!Etch rate range | !Etch rate range | ||
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*~ | *~?nm/min | ||
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*~?nm/min | *~?nm/min | ||
| Line 39: | Line 39: | ||
!Etch rate range | !Etch rate range | ||
| | | | ||
*~ | *~?nm/min | ||
| | | | ||
*~?nm/min | *~?nm/min | ||