Specific Process Knowledge/Etch/Etching of Titanium: Difference between revisions
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==Etching of | ==Etching of Titanium== | ||
Etching of | Etching of titanium can be done either by wet etch, dry etch or by sputtering with ions. | ||
*[[Specific Process Knowledge/Etch/Wet | *[[Specific Process Knowledge/Etch/Wet Titanium Etch|Etching of Ti by wet etch]] | ||
*[[Specific Process Knowledge/Etch/ICP Metal Etcher/Chromium|Etching of Cr by dry etch]] | *[[Specific Process Knowledge/Etch/ICP Metal Etcher/Chromium|Etching of Cr by dry etch]] | ||
*[[Specific_Process_Knowledge/Etch/IBE⁄IBSD Ionfab 300|Sputtering of Cr]] | *[[Specific_Process_Knowledge/Etch/IBE⁄IBSD Ionfab 300|Sputtering of Cr]] | ||