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Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

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|style="background:LightGrey; color:black"|Etch rates
|style="background:LightGrey; color:black"|Etch rates
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* Alumninium : ~350 nm/min (depending on features size and etch load)
* Aluminium : ~350 nm/min (depending on features size and etch load)
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|style="background:LightGrey; color:black"|Anisotropy
|style="background:LightGrey; color:black"|Anisotropy
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