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Specific Process Knowledge/Etch/Etching of Aluminium: Difference between revisions

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!Parameter 1
!Etch rate range
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*A
*A
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!Parameter 2
!Etch profile
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*A
*Isotropic
*B
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*C
*Isotropic
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*Can vary from isotropic to anisotropic (vertical sidewalls)
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*A
*Anisotropic (angles sidewalls, typical around 70 dg)
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