Specific Process Knowledge/Etch/Etching of Aluminium: Difference between revisions
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![[Specific Process Knowledge/Thin film deposition/Furnace LPCVD Nitride| | ![[Specific Process Knowledge/Thin film deposition/Furnace LPCVD Nitride|Al wet etch 1]] | ||
![[Specific Process Knowledge/Thin film deposition/PECVD| | ![[Specific Process Knowledge/Thin film deposition/PECVD|Al wet etch 2]] | ||
![[Specific Process Knowledge/Thin film deposition/PECVD|Al etch by ICP metal]] | |||
![[Specific Process Knowledge/Thin film deposition/PECVD|Al sputtering by IBE (Ionfab300+)]] | |||
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