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==Etching of Aluminium==
==Etching of Aluminium==


Write a short description of the process and how to perform the process.
Etching of aluminium can be done either by wet etch, dry etch or by sputtering with ions.
 
*[[/Deposition of silicon nitride using LPCVD|Etching of Al by wet etch: 1]]
*[[/Deposition of silicon nitride using LPCVD|Process description using methode 1]]
*[[/Deposition of silicon nitride using LPCVD|Etching of Al by wet etch: 2]]
<!-- Link to the process info page in LabAdviser -->
*[[/Deposition of silicon nitride using LPCVD|Etching of Al by dry etch]]
 
*[[/Deposition of silicon nitride using LPCVD|Etching of Al by sputering]]
*[[/Deposition of silicon nitride using LPCVD|Process description using methode 2]]
<!-- Link to the process info page in LabAvdiser -->
 
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