Specific Process Knowledge/Thin film deposition/Deposition of Silver: Difference between revisions
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! Sputter evaporation ([[Specific Process Knowledge/Thin film deposition/Multisource PVD|PVD co-sputter/evaporation]]) | ! Sputter evaporation ([[Specific Process Knowledge/Thin film deposition/Multisource PVD|PVD co-sputter/evaporation]]) | ||
! Sputter evaporation ([[Specific Process Knowledge/Thin film deposition/Wordentec|Wordentec]]) | ! Sputter evaporation ([[Specific Process Knowledge/Thin film deposition/Wordentec|Wordentec]]) | ||
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|Dependent on [[/Sputter rates for Ag PVD co-sputter/evaporation|process parameters]]. | |Dependent on [[/Sputter rates for Ag PVD co-sputter/evaporation|process parameters]]. | ||
|Depending on process paramterers (see logbook) | |Depending on process paramterers (see logbook) | ||
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|-style="background:WhiteSmoke; color:black" | |||
! Comment | |||
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|Only very thin layers. | |||
|Only very thin layers (up to 100nm). | |||
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