Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
| Line 90: | Line 90: | ||
! Allowed substrates | ! Allowed substrates | ||
| | | | ||
* Silicon wafers | |||
* Quartz wafers | |||
* Pyrex wafers | |||
| | |||
* Silicon wafers | |||
* Quartz wafers | |||
* Pyrex wafers | |||
| | |||
* Silicon wafers | |||
* Quartz wafers | |||
* Pyrex wafers | |||
| | | | ||
* Silicon wafers | * Silicon wafers | ||
| Line 96: | Line 110: | ||
* Pyrex wafers | * Pyrex wafers | ||
| | | | ||
* Silicon wafers | * Silicon wafers | ||
| Line 111: | Line 123: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!Allowed materials | !Allowed materials | ||
|| | | | ||
* Silicon oxide | |||
* Silicon (oxy)nitride | |||
* Photoresist | |||
* PMMA | |||
* Mylar | |||
* SU-8 | |||
* Metals | |||
| | |||
* Silicon oxide | |||
* Silicon (oxy)nitride | |||
* Photoresist | |||
* PMMA | |||
* Mylar | |||
* SU-8 | |||
* Metals | |||
| | | | ||
| Line 120: | Line 150: | ||
* Mylar | * Mylar | ||
* SU-8 | * SU-8 | ||
* Metals | |||
| | | | ||
* Silicon oxide | * Silicon oxide | ||
| Line 130: | Line 159: | ||
* Mylar | * Mylar | ||
* SU-8 | * SU-8 | ||
* Metals | |||
| | | | ||
| Line 138: | Line 168: | ||
* Mylar | * Mylar | ||
* SU-8 | * SU-8 | ||
* Metals | |||
| | |||
* Silicon oxide | |||
* Silicon (oxy)nitride | |||
* Photoresist | |||
* PMMA | |||
* Mylar | |||
* SU-8 | |||
* Metals | |||
|} | |} | ||