Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
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* Pyrex wafers | * Pyrex wafers | ||
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* Silicon wafers | * Silicon wafers | ||
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!Allowed materials | !Allowed materials | ||
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* Silicon oxide | * Silicon oxide | ||
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* SU-8 | * SU-8 | ||
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* Silicon oxide | * Silicon oxide | ||
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==Aluminium deposition on ZEP520A for lift-off== | ==Aluminium deposition on ZEP520A for lift-off== | ||