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Specific Process Knowledge/Thin film deposition/Deposition of Silicon: Difference between revisions

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PolySilicon can be sputtered in Alcatel and be deposited in the PolySilicon furnace.
PolySilicon can be sputtered in Alcatel and be deposited in the PolySilicon furnace.In the chart below you can compare the two different deposition methodes:
 
Tin can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment.




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