Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions
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The Boron Drive-in furnace is the top furnace tube in the A-stack positioned in cleanroom 2. The A-stack together with the Gate Oxide furnace (C1) are the cleanest of all furnaces in the cleanroom. Please be aware of which substrates that are allowed to enter this furnace. Check [http://www.labmanager.danchip.dtu.dk/view_binary.php?fileId=1250 the cross contamination chart]. | The Boron Drive-in furnace is the top furnace tube in the A-stack positioned in cleanroom 2. The A-stack together with the Gate Oxide furnace (C1) are the cleanest of all furnaces in the cleanroom. Please be aware of which substrates that are allowed to enter this furnace. Check [http://www.labmanager.danchip.dtu.dk/view_binary.php?fileId=1250 the cross contamination chart]. | ||
'''The user manual | '''The user manual, technical information and contact information can be found in LabManager:''' | ||
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=47 Boron Drive-in furnace (A1)]''' | '''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=47 Boron Drive-in furnace (A1)]''' | ||