Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF): Difference between revisions
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|'''Size of substrate''' | |'''Size of substrate''' | ||
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4" wafers | 4"-6" wafers | ||
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2"-6" wafers | 2"-6" wafers | ||
| Line 116: | Line 116: | ||
|'''Size of substrate''' | |'''Size of substrate''' | ||
| | | | ||
4" wafers | 4"-6" wafers | ||
| | | | ||
2"-6" wafers | 2"-6" wafers | ||