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Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE Si etch: Difference between revisions

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Bureaucrats, danchip, Administrators
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Best recipe with respect to the etch profile and low redeposition:
===Best recipe with respect to the etch profile and low redeposition===
{| border="2" cellspacing="2" cellpadding="3"  
{| border="2" cellspacing="2" cellpadding="3"  
!Parameter
!Parameter
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