Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride: Difference between revisions
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*deposition on both sides of the substrate | *deposition on both sides of the substrate | ||
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*1-3 4" wafers or | *1-3 4" wafers or one 6" wafer or many smaller chips per run | ||
*deposition on one side of the substrate | *deposition on one side of the substrate | ||
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