Specific Process Knowledge/Characterization: Difference between revisions
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===[[Profiler]]=== | ===[[Profiler]]=== | ||
*Tencor | *Tencor | ||
*[[Dektak stylus profiler]] | *[[Dektak 8 stylus profiler]] | ||
===[[Optical microscope]]=== | ===[[Optical microscope]]=== | ||
===[[Optical characterization]]=== | ===[[Optical characterization]]=== | ||
Revision as of 12:03, 2 October 2007
Choose topic
- Surface imaging
- Topographic measurement
- Stress measurement
- Filmthickness measurement
- Element analysis
- Measurement of optical constants
- Hydrophobicity measurement
- Resistivity measurement
- Wafer thickness measurement
Choose equipment
SEM: Scanning Electron Microscopy
- LEO SEM
- FEI SEM
- JEOL SEM
AFM: Atomic Force Microscopy
Profiler
- Tencor
- Dektak 8 stylus profiler
Optical microscope
Optical characterization
- ellipsometer
- Filmtek
- prism coupler