Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions

Revision as of 21:11, 4 February 2013


	In the image the following parameters are shown: Top Width (TW) Depth (D) Bottom Width (BW) Mid Width (MW) To speed up the characterisation post-SEM the parameter 'Pixel Size' (PS) is added to the SEM databar (the blue circle).
	Depth	D*PS
	Bowing	$2{\frac {MW-{\frac {TW+BW}{2}}}{(TW+BW)}}$
	Sidewall angle	$acos({\frac {TW-BW}{2{\sqrt {D^{2}+{\frac {1}{4}}(TW^{2}-BW^{2})}}}})$

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 {| border="2" cellspacing="0" cellpadding="0" align="left"
-! rowspan="4" align="center" | [[Image:Trench-defs-1.jpg|512px x 384px|Solid shade]]
+! rowspan="5" align="center" | [[Image:Trench-defs-1.jpg|512px x 384px|Solid shade]]
 |-
 | colspan="2" width="300px"| In the image the following parameters are shown: