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Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions

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{| border="2" cellspacing="0" cellpadding="0" align="left"  
{| border="2" cellspacing="0" cellpadding="0" align="left"  
! rowspan="4" align="center" | [[Image:Trench-defs-1.jpg|512px x 384px|Solid shade]]
! rowspan="5" align="center" | [[Image:Trench-defs-1.jpg|512px x 384px|Solid shade]]
|-
|-
| colspan="2" width="300px"| In the image the following parameters are shown:
| colspan="2" width="300px"| In the image the following parameters are shown: