Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions

Revision as of 21:11, 4 February 2013


	In the image the following parameters are shown: Top Width (TW) Depth (D) Bottom Width (BW) Mid Width (MW) To speed up the characterisation post-SEM the parameter 'Pixel Size' (PS) is added to the SEM databar (the blue circle).
	Depth	D*PS
	Bowing	$2{\frac {MW-{\frac {TW+BW}{2}}}{(TW+BW)}}$
Sidewall angle	$acos({\frac {TW-BW}{2{\sqrt {D^{2}+{\frac {1}{4}}(TW^{2}-BW^{2})}}}})$

@@ Line 3: / Line 3: @@
 {| border="2" cellspacing="0" cellpadding="0" align="left"
-! rowspan="6" align="center" | [[Image:Trench-defs-1.jpg|512px x 384px|Solid shade]]
+! rowspan="4" align="center" | [[Image:Trench-defs-1.jpg|512px x 384px|Solid shade]]
 |-
 | colspan="2" width="300px"| In the image the following parameters are shown:
@@ Line 20: / Line 20: @@
 ! Sidewall angle
 | <math>acos(\frac{TW-BW}{2\sqrt{D^2+\frac{1}{4}(TW^2-BW^2)}})  </math>
-|-
-| <math>\sum_{n=0}^\infty \frac{x^n}{n!}</math>
 |-
 |}