Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions
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! Sidewall angle | ! Sidewall angle | ||
| <math>acos(\frac{TW-BW}{2\sqrt{D^2+\frac{1}{4 | | <math>acos(\frac{TW-BW}{2\sqrt{D^2+\frac{1}{4}(TW^2-BW^2)}}) </math> | ||
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| <math>\sum_{n=0}^\infty \frac{x^n}{n!}</math> | | <math>\sum_{n=0}^\infty \frac{x^n}{n!}</math> | ||
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|} | |} | ||