Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions
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! rowspan="6" align="center" | [[Image:Trench-defs-1.jpg|512px x 384px|Solid shade]] | ! rowspan="6" align="center" | [[Image:Trench-defs-1.jpg|512px x 384px|Solid shade]] | ||
|- | |- | ||
| width="300px"| In the image the following parameters are shown: | | colspan="2" width="300px"| In the image the following parameters are shown: | ||
* Top Width (TW) | * Top Width (TW) | ||
* Depth (D) | * Depth (D) | ||
* Bottom Width (BW) | * Bottom Width (BW) | ||
* Mid Width (MW) | * Mid Width (MW) | ||
To speed up the characterisation post-SEM the parameter 'Pixel Size' (PS) is added to the SEM databar. | To speed up the characterisation post-SEM the parameter 'Pixel Size' (PS) is added to the SEM databar (the blue circle). | ||
|- | |- | ||
! Depth | ! Depth | ||
| D*PS | |||
|- | |||
! Bowing | |||
| <math>2\frac{MW-\frac{TW+BW}{2}}{(TW+BW)}</math> | |||
|- | |||
! Sidewall angle | |||
| <math>acos(\frac{TW-BW}{2\sqrt()}) </math> | |||
|- | |- | ||
| <math>\sum_{n=0}^\infty \frac{x^n}{n!}</math> | | <math>\sum_{n=0}^\infty \frac{x^n}{n!}</math> | ||
|- | |- | ||
|} | |} | ||
Revision as of 20:59, 4 February 2013
Parameters
| |
|---|---|
In the image the following parameters are shown:
To speed up the characterisation post-SEM the parameter 'Pixel Size' (PS) is added to the SEM databar (the blue circle). | |
| Depth | D*PS |
| Bowing | |
| Sidewall angle | |
