Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions

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{| border="2" cellspacing="0" cellpadding="0" align="center"  
{| border="2" cellspacing="0" cellpadding="0" align="left"  
! rowspan="6" align="center" | [[Image:Trench-defs-1.jpg|512px x 384px|Solid shade]]
! rowspan="6" align="center" | [[Image:Trench-defs-1.jpg|512px x 384px|Solid shade]]
|-
|-

Revision as of 20:47, 4 February 2013

Parameters

Solid shade
In the image the following parameters are shown:
  • Top Width (TW)
  • Depth (D)
  • Bottom Width (BW)
  • Mid Width (MW)

To speed up the characterisation post-SEM the parameter 'Pixel Size' (PS) is added to the SEM databar.

Depth
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