Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions

Revision as of 20:45, 4 February 2013

Parameters

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In the image the following parameters are shown:

Top Width (TW)
Depth (D)
Bottom Width (BW)
Mid Width (MW)

To speed up the characterisation post-SEM the parameter 'Pixel Size' (PS) is added to the SEM databar.

Depth

@@ Line 5: / Line 5: @@
 ! rowspan="6" align="center" | [[Image:Trench-defs-1.jpg|512px x 384px|Solid shade]]
 |-
-! Top Width (TW)
+! In the image the following parameters are shown:
+* Top Width (TW)
+* Depth (D)
+* Bottom Width (BW)
+* Mid Width (MW)
+To speed up the characterisation post-SEM the parameter 'Pixel Size' (PS) is added to the SEM databar.
+|-
+! Depth
 |-
-! Depth (D)
+<math>\sum_{n=0}^\infty \frac{x^n}{n!}</math>
-|-
-! Bottom Width (BW)
-|-
-! Mid Width (MW)
-|-
-! Pixel Size (PS)
 |-
 |}