Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions
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{| border="2" cellspacing="0" cellpadding="0" align="center" | {| border="2" cellspacing="0" cellpadding="0" align="center" | ||
! rowspan="5" align="center" | [[Image:Trench-defs-1.jpg| | ! rowspan="5" align="center" | [[Image:Trench-defs-1.jpg|512px x 384px|thumb|left|Solid shade]] | ||
|- | |- | ||
! Top Width (TW) | ! Top Width (TW) | ||
Revision as of 20:29, 4 February 2013
Parameters
 |
|---|
| Top Width (TW) |
| Depth (D) |
| Bottom Width (BW) |
| Mid Width (MW) |
| Pixel Size (PS) |