Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions

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{| border="2" cellspacing="0" cellpadding="0" align="center"  
{| border="2" cellspacing="0" cellpadding="0" align="center"  
! rowspan="5" align="center" width="300px" | [[Image:Trench-defs-1.jpg]]
! rowspan="5" align="center" | [[Image:Trench-defs-1.jpg|width="300px"]]
|-
|-
! Top Width (TW)
! Top Width (TW)

Revision as of 20:24, 4 February 2013

Parameters

width="300px"
Top Width (TW)
Depth (D)
Bottom Width (BW)
Mid Width (MW)
Pixel Size (PS)
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