Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions
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== Parameters == | == Parameters == | ||
{| border="2" cellspacing="0" cellpadding="0" align="center" | |||
! rowspan="5" align="center" width="500px" | [[Image:Trench-defs-1.jpg]] | |||
! Top Width (TW) | |||
! Depth (D) | |||
! Bottom Width (BW) | |||
! Mid Width (MW) | |||
! Pixel Size (PS) | |||
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|} | |||
Revision as of 20:20, 4 February 2013
Parameters
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Top Width (TW) | Depth (D) | Bottom Width (BW) | Mid Width (MW) | Pixel Size (PS) |
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