Specific Process Knowledge/Characterization/Sample imaging: Difference between revisions
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A Danchip a number of instruments are available for sample imaging, including a several optical microscopes, an optical profiler, three SEMs (scanning electron micrscopes), an AFM (atomic force microscope) and two stylus profilers (Dektak). These instruments cover wide range of applications. | A Danchip a number of instruments are available for sample imaging, including a several optical microscopes, an optical profiler, three SEMs (scanning electron micrscopes), an AFM (atomic force microscope) and two stylus profilers (Dektak). These instruments cover wide range of applications. | ||
Optical micrscope... | |||
One of the advantages of the optical microscopes is that they provide fast and easy accessible information about any sample without any sample preparation. They do, however, also have some limitations. Since the depth of focus is quite limited, especially at high magnifications. Another disadvantage is the physical limit to the resolution that makes it impossible to image structures below 1 µm | One of the advantages of the optical microscopes is that they provide fast and easy accessible information about any sample without any sample preparation. They do, however, also have some limitations. Since the depth of focus is quite limited, especially at high magnifications. Another disadvantage is the physical limit to the resolution that makes it impossible to image structures below 1 µm | ||
Optical profiler... | |||
The optical profiler provides standard microscope imaging, confocal imaging, confocal profiling, PSI (Phase Shift Interferometry), VSI (Vertical Scanning Interferometry) and high resolution thin film thickness measurement on a single instrument. The main purpose is 3D topographic imaging of surfaces, step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution. | The optical profiler provides standard microscope imaging, confocal imaging, confocal profiling, PSI (Phase Shift Interferometry), VSI (Vertical Scanning Interferometry) and high resolution thin film thickness measurement on a single instrument. The main purpose is 3D topographic imaging of surfaces, step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution. | ||
SEM... | |||
AFM... | |||
Dektak... | |||
*[[Specific_Process_Knowledge/Characterization/Optical_microscope|Sample imaging using optical microscopes]] | *[[Specific_Process_Knowledge/Characterization/Optical_microscope|Sample imaging using optical microscopes]] | ||