Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
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*[[/Si etch using ASE|ASE (Advanced Silicon Etch)]] | *[[/Si etch using ASE|ASE (Advanced Silicon Etch)]] | ||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus|DRIE-Pegasus (Silicon Etch)]] | *[[Specific Process Knowledge/Etch/DRIE-Pegasus|DRIE-Pegasus (Silicon Etch)]] | ||
*[[Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300|IBE/IBSD Ionfab 300]] | *[[Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE Si etch|IBE/IBSD Ionfab 300]] | ||
==Comparison of KOH etch, wet PolySilicon etch, RIE etch, ASE etch and DRIE-Pegasus for etching of Silicon== | ==Comparison of KOH etch, wet PolySilicon etch, RIE etch, ASE etch and DRIE-Pegasus for etching of Silicon== | ||