Specific Process Knowledge/Characterization/Sample imaging: Difference between revisions

Revision as of 14:43, 4 February 2013 view source Pvl (talk \| contribs) Bureaucrats, danchip, Administrators 516 edits →Comparison of optical microscope, optical profiler, SEM, AFM and stylus profiler for sample imaging ← Older edit		Revision as of 14:46, 4 February 2013 view source Pvl (talk \| contribs) Bureaucrats, danchip, Administrators 516 edits →Sample imaging Newer edit →
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	The optical profiler provides standard microscope imaging, confocal imaging, confocal profiling, PSI (Phase Shift Interferometry), VSI (Vertical Scanning Interferometry) and high resolution thin film thickness measurement on a single instrument. The main purpose is 3D topographic imaging of surfaces, step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution.		The optical profiler provides standard microscope imaging, confocal imaging, confocal profiling, PSI (Phase Shift Interferometry), VSI (Vertical Scanning Interferometry) and high resolution thin film thickness measurement on a single instrument. The main purpose is 3D topographic imaging of surfaces, step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution.