Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions

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 *25 wafers of 100mm or 150mm in our 6" bath
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-*<nowiki>#</nowiki> small samples
+*<nowiki>#</nowiki>25 100 mm wafers in our 100mm bath
-*<nowiki>#</nowiki> 50 mm wafers
-*25 100 mm wafers in our 100mm bath
-*<nowiki>#</nowiki> 150 mm wafers
 |
-We have cassettes that fit to
+*As many small samples as can be fitted on the 100mm carrier.
-*<nowiki>#</nowiki> 4 small samples (20mm, 12mm, 8mm, 4mm)
+*1 100mm wafer (or smaller with carrier)
-*<nowiki>#</nowiki> 6 wafers of 50 mm in size
+*1 150mm wafer (only when the system is set up for 150mm)
-*<nowiki>#</nowiki> 2 wafers of 100 mm in size
-*<nowiki>#</nowiki> 1 wafer of 150 mm in size
 |
-*<nowiki>#</nowiki> small samples
+*As many small samples as can be fitted on a 100mm wafer
-*<nowiki>#</nowiki> 50 mm wafers
+*1 50 mm wafer fitted on a 100mm wafer
-*<nowiki>#</nowiki> 100 mm wafers
+*1 100 mm wafer
-*<nowiki>#</nowiki> 150 mm wafers
+*1 150 mm wafers (only when the system is set up to 150mm)
 |
-*<nowiki>#</nowiki> small samples
+*As many small samples as can be fitted on a 100mm wafer
-*<nowiki>#</nowiki> 50 mm wafers
+*1 50 mm wafer fitted on a 100mm wafer
-*<nowiki>#</nowiki> 100 mm wafers
+*1 100 mm wafer
-*<nowiki>#</nowiki> 150 mm wafers
+*1 150 mm wafers (only when the system is set up to 150mm)
+|
+*As many small samples as can be fitted on a 100mm wafer
+*1 50 mm wafer fitted on a 100mm wafer
+*1 100 mm wafer
+*1 150 mm wafers (only when the system is set up to 150mm)
+|
+*As many samples as can be securely fitted on a up to 200mm wafer
+*1 50 mm wafer
+*1 100 mm wafer
+*1 150 mm wafers
+*1 200 mm wafer
 |-
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