Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
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!Substrate size | !Substrate size | ||
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* | *25 wafers of 100mm in our 100mm bath | ||
*1-5 wafers of 100mm or 50mm in "Fumehood KOH" | |||
* | *25 wafers of 100mm or 150mm in our 6" bath | ||
* | |||
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*<nowiki>#</nowiki> small samples | *<nowiki>#</nowiki> small samples | ||
*<nowiki>#</nowiki> 50 mm wafers | *<nowiki>#</nowiki> 50 mm wafers | ||
* | *25 100 mm wafers in our 100mm bath | ||
*<nowiki>#</nowiki> 150 mm wafers | *<nowiki>#</nowiki> 150 mm wafers | ||
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