Specific Process Knowledge/Characterization/Sample imaging: Difference between revisions
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One of the advantages of the optical microscopes is that they provide fast and easy accessible information about any sample without any sample preparation. They do, however, also have some limitations. Since the depth of focus is quite limited, especially at high magnifications. Another disadvantage is the physical limit to the resolution that makes it impossible to image structures below 1 µm | One of the advantages of the optical microscopes is that they provide fast and easy accessible information about any sample without any sample preparation. They do, however, also have some limitations. Since the depth of focus is quite limited, especially at high magnifications. Another disadvantage is the physical limit to the resolution that makes it impossible to image structures below 1 µm | ||
The optical profiler provides standard microscope imaging, confocal imaging, confocal profiling, PSI (Phase Shift Interferometry), VSI (Vertical Scanning Interferometry) and high resolution thin film thickness measurement on a single instrument. The main purpose is 3D topographic imaging of surfaces, step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution. | |||