Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions
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| colspan="4" | Temperature 20 degs, HBC 10 torr, Short funnel, with baffle & 5mm spacers | | colspan="4" | Temperature 20 degs, HBC 10 torr, Short funnel, with baffle & 5mm spacers | ||
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== Process A performance == | |||
The perfomance of Process A has been investigated as a function of feature size and etch load. | |||