Specific Process Knowledge/Lithography: Difference between revisions
| Line 44: | Line 44: | ||
|- | |- | ||
|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
! | !Pattern size range | ||
| | | | ||
*~1µm and up | *~1µm and up | ||
| Line 44: | Line 44: | ||
|- | |- | ||
|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
! | !Pattern size range | ||
| | | | ||
*~1µm and up | *~1µm and up | ||