Specific Process Knowledge/Lithography: Difference between revisions

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Name of process

Write a short description of the process and how to perform the process.

Process description using methode 1

Process description using methode 2

Comparison methode 1 and methode 2 for the process

	Methode 1	Methode 2
Generel description	Generel description - methode 1	Generel description - methode 2
Parameter 1	A B	A B
Parameter 2	A B C	A
Substrate size	# small samples # 50 mm wafers # 100 mm wafers # 150 mm wafers	# small samples # 50 mm wafers # 100 mm wafers # 150 mm wafers
Allowed materials	Allowed material 1 Allowed material 2	Allowed material 1 Allowed material 2 Allowed material 3

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+'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/... click here]'''
+<!-- Replace "http://labadviser.danchip.dtu.dk/..." wih the link to the Labadviser page-->
+== Name of process ==
+Write a short description of the process and how to perform the process.
+*[[/Deposition of silicon nitride using LPCVD|Process description using methode 1]]
+<!-- Link to the process info page in LabAdviser -->
+*[[/Deposition of silicon nitride using LPCVD|Process description using methode 2]]
+<!-- Link to the process info page in LabAvdiser -->
+==Comparison methode 1 and methode 2 for the process==
+{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
+|-
+|-
+|-style="background:silver; color:black"
+!
+![[Specific Process Knowledge/Thin film deposition/Furnace LPCVD Nitride|Methode 1]]
+![[Specific Process Knowledge/Thin film deposition/PECVD|Methode 2]]
+|-
+|-
+|-style="background:WhiteSmoke; color:black"
+!Generel description
+|Generel description - methode 1
+|Generel description - methode 2
+|-
+|-
+|-style="background:LightGrey; color:black"
+!Parameter 1
+|
+*A
+*B
+|
+*A
+*B
+|-
+|-
+|-style="background:WhiteSmoke; color:black"
+!Parameter 2
+|
+*A
+*B
+*C
+|
+*A
+|-
+|-
+|-style="background:LightGrey; color:black"
+!Substrate size
+|
+*<nowiki>#</nowiki> small samples
+*<nowiki>#</nowiki> 50 mm wafers
+*<nowiki>#</nowiki> 100 mm wafers
+*<nowiki>#</nowiki> 150 mm wafers
+|
+*<nowiki>#</nowiki> small samples
+*<nowiki>#</nowiki> 50 mm wafers
+*<nowiki>#</nowiki> 100 mm wafers
+*<nowiki>#</nowiki> 150 mm wafers
+|-
+|-
+|-style="background:WhiteSmoke; color:black"
+!'''Allowed materials'''
+|
+*Allowed material 1
+*Allowed material 2
+|
+*Allowed material 1
+*Allowed material 2
+*Allowed material 3
+|-
+|}
+<br clear="all" />