Specific Process Knowledge/Etch/DRIE-Pegasus/processB: Difference between revisions
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<gallery caption="The results of process B after 17 and 34 cycles of etching" widths="500" heights=" | <gallery caption="The results of process B after 17 and 34 cycles of etching" widths="500" heights="350" perrow="2"> | ||
image:Travkatesting1a.jpg| | image:Travkatesting1a.jpg| | ||
image:Travkatesting1b.jpg|The 60 nm trenches | image:Travkatesting1b.jpg|The 60 nm trenches | ||
</gallery> | </gallery> | ||